Towards bottom-up fabrication of nanoelectronics: understanding and advancing area-selective atomic layer deposition

Prijs: NWOVidiWetenschappelijk


The ultimate ambition in nanoscience is to synthesize materials from the bottom-up with atomic-level accuracy, yet so far the fabrication of nanoelectronics still relies completely on top-down processing. The researchers will develop new nanoscale fabrication methods relying on the deposition of material only where it is needed.
Mate van erkenningNationaal
Toekennende organisatieNWO