• 14472 Citaties
19962020

Onderzoeksresultaten per jaar

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Persoonlijk profiel

Quote

"My aim is to advance the field of atomic scale processing for energy and information technologies such as photovoltaics and nanoelectronics"

Research profile

Erwin Kessels is a full professor at the Department of Applied Physics of Eindhoven University of Technology (TU/e). He is also the scientific director of the NanoLab@TU/e facilities which provides full-service and open-access clean room infrastructure for R&D in nanotechnology. Erwin’s research interests cover the field of synthesis of ultrathin films and nanostructures using methods such as (plasma-enhanced) chemical vapor deposition (CVD) and atomic layer deposition (ALD) for a wide variety of applications, mostly within the areas of nanoelectronics and photovoltaics.

Within the field of ALD, he has contributed most prominently by his work on plasma-assisted ALD, his research related to ALD for photovoltaics, and ALD for nanopatterning (including area-selective ALD). Currently, Erwin is focusing his research mostly on atomic scale processing, a field which is believed to grow in importance quickly in the next decade, for a wide variety of application domains.

Academic background

Erwin received his MSc (1996) and PhD (with honors) (2000) in Applied Physics from TU/e. His doctoral thesis work was partly carried out at the University of California Santa Barbara and as a postdoc he was affiliated to the Colorado State University and Philipps University in Marburg (Germany). In 2004/2005 he spent a six-months sabbatical at the University of California Berkeley. In 2007 the American Vacuum Society awarded him the Peter Mark Memorial Award. Erwin received an NWO Vici grant in 2010 to set up a large research program on ‘nanomanufacturing’ in order to bridge the gap between nanoscience/nanotechnology and industrial application. In 2008 he was chair of the International Conference on Atomic Layer Deposition in 2008 (Bruges, Belgium) and in 2019 he received the ALD Innovator award at this yearly conference. Erwin will serve as a chair of the 7th workshop on atomic layer etching in 2020 (Ghent, Belgium). Since 2019 Erwin has also been appointed as Visiting International Professor and a DFG Mercator fellow at the Ruhr University Bochum. Erwin is active within the American Vacuum Society and has been President of the Netherlands Vacuum Society. He is an associate editor of the Journal of Vacuum Science and Technology. He has published over 300 papers, has given 100+ invited presentations, and holds 4 patents. He frequently (co-)organizes ALD-related workshops and is the founder of the ALD Academy (www.ALDacademy) and the blog AtomicLimits.com.

 

Vingerafdruk Verdiep u in de onderzoeksgebieden waarop W.M.M. (Erwin) Kessels actief is. Deze onderwerplabels komen uit het werk van deze persoon. Samen vormen ze een unieke vingerafdruk.

  • 19 Soortgelijke profielen

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Onderzoeksoutput

ALD – a truly enabling nanotechnology: And how the Netherlands contributed to its wide spread application

Kessels, W. M. M., 2 jun 2020, In : Nevac Blad. 58, special, blz. 6-9 2.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelPopulair

  • Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers

    Balasubramanyam, S., Merkx, M. J. M., Verheijen, M. A., Kessels, W. M. M., Mackus, A. J. M. & Bol, A. A., 4 mei 2020, In : ACS Materials Letters. 2, 5, blz. 511-518 8 blz.

    Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

    Open Access
    1 Citaat (Scopus)

    Atomic layer deposition of aluminum phosphate using AlMe3, PO(OMe)3 and O2 plasma: film growth and surface reactions

    Hornsveld, N., Kessels, W. M. M. E. & Creatore, M. A., 5 mrt 2020, In : Journal of Physical Chemistry C. 124, 9, blz. 5495-5505 11 blz.

    Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

    Open Access
    Bestand
  • 19 Downloads (Pure)
  • 1 Downloads (Pure)
  • Prijzen

    ALD Innovator Award

    Erwin Kessels (Ontvanger), 22 jul 2019

    Prijs: AndersWerk, activiteit of publicatie gerelateerde prijzen (lifetime, best paper, poster etc.)Wetenschappelijk

    NWO Vici Award : Nanotechnology: the path from lab to production

    W.M.M. Kessels (Ontvanger), 2009

    Prijs: NWOViciWetenschappelijk

  • Research Center for Integrated Nano-Photonics

    H.J.S. Dorren (Ontvanger), W.M.M. Kessels (Ontvanger), P.M. Koenraad (Ontvanger), A.M.J. Koonen (Ontvanger) & B. Koopmans (Ontvanger), 2014

    Prijs: NWOZwaartekrachtWetenschappelijk

  • Activiteiten

    • 14 Aangemelde presentatie
    • 8 Genodigd spreker
    • 1 Redactioneel werk

    New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

    A. Mameli (Deelnemer), M.A. Verheijen (Deelnemer), B. Karasulu (Deelnemer), A.J.M. Mackus (Deelnemer), W.M.M. Kessels (Deelnemer), F. Roozeboom (Spreker)
    30 sep 20184 okt 2018

    Activiteit: Types gesprekken of presentatiesAangemelde presentatieWetenschappelijk

    Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

    A. Mameli (Deelnemer), M.A. Verheijen (Deelnemer), B. Karasulu (Deelnemer), A.J.M. Mackus (Deelnemer), W.M.M. Kessels (Deelnemer), F. Roozeboom (Uitgenodigde spreker)
    24 jul 201828 jul 2018

    Activiteit: Types gesprekken of presentatiesGenodigd sprekerWetenschappelijk

    Journal of Vacuum Science and Technology. A: Vacuum, Surfaces, and Films (Tijdschrift)

    W.M.M. (Erwin) Kessels (Lid redactieraad)
    2015 → …

    Activiteit: Types publicaties van collegiale toetsing en redactioneel werkRedactioneel werkWetenschappelijk

    Applied Materials, Santa Clara, CA, USA

    W.M.M. (Erwin) Kessels (Uitgenodigde spreker)
    1 jul 2010

    Activiteit: Types gesprekken of presentatiesGenodigd sprekerWetenschappelijk

    Samsung Electronics, Yongin-City, Korea

    W.M.M. (Erwin) Kessels (Uitgenodigde spreker)
    1 apr 2010

    Activiteit: Types gesprekken of presentatiesGenodigd sprekerWetenschappelijk

    Cursussen

    Knipsels

    Prof Talk | Two clicks away from cool

    W.M.M. (Erwin) Kessels

    2/07/20

    1 Mediabijdrage

    Pers / media: Onderzoek

    TU/e needs to look for a new cleanroom

    W.M.M. (Erwin) Kessels

    26/06/20

    1 Mediabijdrage

    Pers / media: Onderzoek

    Nieuw lab voor TU/e en Solliance

    W.M.M. (Erwin) Kessels

    1/01/13

    1 Mediabijdrage

    Pers / media: PR activiteiten

    Eindhovens zonnecelonderzoek moet industrieel landen

    W.M.M. (Erwin) Kessels

    1/01/13

    1 Mediabijdrage

    Pers / media: PR activiteiten

    Impacts

    Advanced ALD technologies

    M. (Adriana) Creatore (Onderzoeker), W.M.M. (Erwin) Kessels (Onderzoeker), Adrie J.M. Mackus (Onderzoeker)

    Impact: Research Topic/Theme (at group level)

    CO2 neutral fuels

    Richard A.H. Engeln (Onderzoeker), W.M.M. (Erwin) Kessels (Onderzoeker)

    Impact: Research Topic/Theme (at group level)

    Fundamentals of ultrathin film growth

    W.M.M. (Erwin) Kessels (Onderzoeker), Ageeth A. Bol (Onderzoeker)

    Impact: Research Topic/Theme (at group level)

    Future nanoelectronics and nanopatterning

    Ageeth A. Bol (Onderzoeker), W.M.M. (Erwin) Kessels (Onderzoeker), Adrie J.M. Mackus (Content manager)

    Impact: Research Topic/Theme (at group level)

    Nanolayers for solar cells

    M. (Adriana) Creatore (Onderzoeker), W.M.M. (Erwin) Kessels (Content manager)

    Impact: Research Topic/Theme (at group level)

    Scriptie

    ALD metal oxides for passivating contacts: in c-Si solar cells

    Auteur: Scheerder, R., 2017

    Begeleider: Melskens, J. (Afstudeerdocent 1), van de Loo, B. W. (Afstudeerdocent 2) & Kessels, W. (. (Afstudeerdocent 2)

    Scriptie/masterproef: Master

    Bestand

    Analysis of blister formation in spatial ALD Al2O3 for silicon surface passivation in photovoltaics

    Auteur: Hennen, L., 31 aug 2012

    Begeleider: Kessels, W. (Afstudeerdocent 1) & Granneman, E. (Externe persoon) (Externe coach)

    Scriptie/masterproef: Master

    Bestand

    Anti-reflection coating characterization using scattered polarized light

    Auteur: Ketelaars, H., 31 aug 2014

    Begeleider: Kessels, W. (Afstudeerdocent 1) & van Gerwen, B. (Afstudeerdocent 2)

    Scriptie/masterproef: Master

    Bestand

    Atomic hydrogen induced defect kinetics in a-Si:H: a review of data obtained by evanescent wave cavity ring-down spectroscopy

    Auteur: Peeters, F., 31 dec 2008

    Begeleider: Kessels, W. (Afstudeerdocent 1) & van de Sanden, M. (Afstudeerdocent 2)

    Scriptie/masterproef: Master

    Bestand
    Bestand