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2020

Conformal slip-free wafer chucking using an actuated wafer table

Hermanussen, S. J., Habets, M. B. I., Heertjes, M. F. & Vermeulen, J. P. M. B., 10 feb 2020, 2019 7th International Conference on Control, Mechatronics and Automation (ICCMA). Piscataway: Institute of Electrical and Electronics Engineers, blz. 278-282 5 blz. 8988610

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Downloads (Pure)
2019

Extended Projected Dynamical Systems with Applications to Hybrid Integrator-Gain Systems

Sharif, B., Heertjes, M. F. & Heemels, W. P. M. H., dec 2019, 2019 IEEE 58th Conference on Decision and Control, CDC 2019. Institute of Electrical and Electronics Engineers, blz. 5773-5778 6 blz. 9028882

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Citaten (Scopus)

Hybrid integral reset control with application to a lens motion system

Gruntjens, K. G. J., Heertjes, M. F., van Loon, S. J. L. M., van de Wouw, N. & Heemels, W. P. M. H., 1 jul 2019, 2019 American Control Conference, ACC 2019. Piscataway: Institute of Electrical and Electronics Engineers, blz. 2408-2413 6 blz. 8815268

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Downloads (Pure)

Robust stability and nonlinear loop-shaping design for hybrid integrator-gain-based control systems

van den Eijnden, S. J. A. M., Heertjes, M. F. & Nijmeijer, H., 1 jul 2019, 2019 American Control Conference, ACC 2019. Piscataway: Institute of Electrical and Electronics Engineers, blz. 3063-3068 6 blz. 8814888

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

1 Citaat (Scopus)
10 Downloads (Pure)
2018

A hybrid integrator-gain based low-pass filter for nonlinear motion control

van den Eijnden, S. J. A. M., Knops, Y. & Heertjes, M. F., 26 okt 2018, 2018 IEEE Conference on Control Technology and Applications, CCTA 2018. Piscataway: Institute of Electrical and Electronics Engineers, blz. 1108-1113 6 blz. 8511092

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

3 Citaten (Scopus)
7 Downloads (Pure)

A model-based inferential feedforward approach to deal with hysteresis in a motion system

Subramanian, R. G., Heertjes, M. & de Hoog, T., 9 aug 2018, 2018 Annual American Control Conference, ACC 2018. Piscataway: Institute of Electrical and Electronics Engineers, blz. 2934-2939 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

1 Citaat (Scopus)
2 Downloads (Pure)

Design and performance tradeoffs in MIMO disturbance feedforward control

Beijen, M., Cong, B. & Heertjes, M., 1 jun 2018, Proceedings - 2018 IEEE 15th International Workshop on Advanced Motion Control, AMC 2018. Institute of Electrical and Electronics Engineers, blz. 443-448 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

1 Citaat (Scopus)
1 Downloads (Pure)

Experimental validation of inversion techniques for an LPV motion system

Kasemsinsup, Y., Ardyanto, A. F., Butler, H., Heertjes, M. & Weiland, S., 9 aug 2018, 2018 Annual American Control Conference, ACC 2018. Institute of Electrical and Electronics Engineers, blz. 6690-6696 7 blz. 8431669

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Downloads (Pure)

IO linearization, stability, and control of an input non-affine thermoelectric system

Bos, K., Heck, D., Heertjes, M. & van der Kall, R., 9 aug 2018, 2018 Annual American Control Conference, ACC 2018. Institute of Electrical and Electronics Engineers, blz. 526-531 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

3 Downloads (Pure)

Resonant-dynamics LTV feedforward for flexible motion systems

Kontaras, N., Heertjes, M., Zwart, H. & Steinbuch, M., 9 aug 2018, 2018 Annual American Control Conference, ACC 2018. Institute of Electrical and Electronics Engineers, blz. 6012-6017 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

3 Downloads (Pure)

Robust synchronization of motion in wafer scanners using particle swarm optimization

Looijen, V. A. & Heertjes, M. F., 26 okt 2018, 2018 IEEE Conference on Control Technology and Applications, CCTA 2018. Piscataway: Institute of Electrical and Electronics Engineers, blz. 1102-1107 6 blz. 8511380

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Downloads (Pure)
2017

Acceleration-snap feedforward scheme for a motion system with viscoelastic tuned-mass-damper

Heertjes, M. F., van de Ven, M. L. J. & Kamidi, R., 29 jun 2017, 2017 American Control Conference, ACC 2017, 24-26 May 2017, Seattle, Washington. Piscataway: Institute of Electrical and Electronics Engineers, blz. 2888-2893 6 blz. 7963389

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

1 Citaat (Scopus)
2 Downloads (Pure)

A compliance feedforward scheme for a class of LTV motion systems

Kontaras, N., Heertjes, M. F., Zwart, H. J. & Steinbuch, M., 29 jun 2017, 2017 American Control Conference, ACC 2017, 24-26 May 2017, Seattle, Washington. Piscataway: Institute of Electrical and Electronics Engineers, blz. 4504-4509 6 blz. 7963649

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

1 Citaat (Scopus)
5 Downloads (Pure)

Estimating transmissibility functions in industrial vibration isolation systems by combining floor and shaker excitations

Beijen, M. A., Heertjes, M. F., Voorhoeve, R. J. & Oomen, T. A. E., 2017, 36th Benelux Meeting on Systems and Control, 28-30 March 2017, Spa, Belgium. blz. 70

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33 Downloads (Pure)

Evaluating performance of multivariable vibration isolators : a frequency domain identification approach applied to an industrial AVIS: A frequency domain identification approach applied to an industrial AVIS

Beijen, M. A., Heertjes, M. A., Voorhoeve, R. J. & Oomen, T. A. E., 2017, 2017 IEEE American Control Conference, 23-26 May 2017, Seattle, Washington . Piscataway: Institute of Electrical and Electronics Engineers, blz. 3512-3517 6 blz. 7963490

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

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3 Citaten (Scopus)
66 Downloads (Pure)

Hybrid integrator design for enhanced tracking in motion control

Deenen, D. A., Heertjes, M. F., Heemels, W. P. M. H. & Nijmeijer, H., 29 jun 2017, 2017 American Control Conference (ACC), 24-26 May 2017, Seattle, Washington. Piscataway: Institute of Electrical and Electronics Engineers, blz. 2863-2868 6 blz. 7963385

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

7 Citaten (Scopus)
1 Downloads (Pure)

Iterative pole-zero model updating using multiple frequency response functions

Dorosti, M., Fey, R. H. B., Heertjes, M. F., van de Wal, M. M. J. & Nijmeijer, H., 2017, Dynamics of Civil Structures, Volume 2: Proceedings of the 35th IMAC, A Conference and Exposition on Structural Dynamics 2017. Caicedo, J. & Pakzad, S. (redactie). Dordrecht: Springer, blz. 65-70 6 blz. (Conference Proceedings of the Society for Experimental Mechanics Series).

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Low-pass filter with hybrid integrator-gain switching for increased bandwidth

Heertjes, M. F. & Knops, Y., 29 jun 2017, ENOC 2017 : 9th European Nonlinear Dynamics Conference, 25-30 June 2017, Budapest, Hungary. Budapest, Hungary, blz. 1-2 2 blz.

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117 Downloads (Pure)

Reference-tracking feedforward control design for linear dynamical systems through signal decomposition

Kasemsinsup, Y., Romagnoli, R., Heertjes, M. F., Weiland, S. & Butler, H., 29 jun 2017, 2017 American Control Conference, ACC 2017, 24-26 May 2017, Seatlle, Washington. Piscataway: Institute of Electrical and Electronics Engineers, blz. 2387-2392 6 blz. 7963310

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

5 Citaten (Scopus)
4 Downloads (Pure)
2016

Disturbance feedforward control for air mount systems with acoustic resonances

Beijen, M. A., Heertjes, M. F. & Butler, H., 2016, Book of Abstracts of the 35th Benelux meeting on Systems and Control, 22-24 March 2016, Soesterberg, The Netherlands. Enschede: Twente University, blz. 149 1 blz.

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37 Downloads (Pure)

Exact plant inversion of flexible motion systems with a time-varying state-to-output map

Kasemsinsup, Y., Heertjes, M. F., Butler, H. & Weiland, S., 2016, 2016 European Control Conference, ECC 2016. Piscataway: Institute of Electrical and Electronics Engineers, blz. 2483-2488 6 blz. 7810663

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

6 Citaten (Scopus)
13 Downloads (Pure)

Frequency response sensitivity model updating using generic parameters

Dorosti, M., Heck, F. J. M., Fey, R. H. B., Heertjes, M. F., van de Wal, M. M. J. & Nijmeijer, H., jul 2016, 2016 American Control Conference (ACC), July 6-8, 2016, Boston, MA, USA. American Automatic Control Council (AACC), blz. 6215-6220 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Citaten (Scopus)
14 Downloads (Pure)

Modeling and feedforward compensation of air mounts with internal Helmholtz resonances

Beijen, M. A., Jin, J., Heertjes, M. F. & Butler, H., 2016, Proceedings of the American Control Conference (ACC), 6-8 July 2016, Boston, Massachusetts. American Automatic Control Council (AACC), blz. 2623-2628

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

1 Citaat (Scopus)
8 Downloads (Pure)

Second-order reset elements for stage control design

Hazeleger, L., Heertjes, M. F. & Nijmeijer, H., 2016, Proceedings of the American Control Conference (ACC), 6-8 July 2016, Boston, Massachusetts. American Automatic Control Council (AACC), blz. 2643-2648

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

8 Citaten (Scopus)
18 Downloads (Pure)
2015

A waterbed effect in disturbance feedforward control with application to a vibration isolator

Beijen, M. A., Heertjes, M. F., Butler, H. & Steinbuch, M., 2015, 34th Benelux meeting on Systems and Control, March 24-26, 2015, Lommel, Belgium. Book of Abstracts. blz. 115 1 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic

4 Downloads (Pure)

Common zeros in synchronization of high-precision stage systems

Ochoa Navarrete, M., Heertjes, M. F. & Munnig-Schmidt, R. H., 2015, Proceedings of the IEEE International Conference on Mechatronics (ICM-2015), 6-8 March 2015, Nagoya, Japan. Piscataway: Institute of Electrical and Electronics Engineers, blz. 602-607 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Citaten (Scopus)
3 Downloads (Pure)

Design of a variable gain integrator with reset

Heertjes, M. F., Gruntjens, K. G. J., Loon, van, S. J. L. M., Kontaras, N. & Heemels, W. P. M. H., 2015, Proceedings of the 2015 American Control Conference (ACC), 1-3 July 2015, Chicago, Illinois. Piscataway: Institute of Electrical and Electronics Engineers, blz. 2155-2160

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

6 Citaten (Scopus)
9 Downloads (Pure)

Mode switching control in stages with synchronized motion

Hatzidimitris, P., Heertjes, M. F. & ten Dam, T., 2015, Proceedings of the International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015), 9-10 march 2015, Nagoya, Japan. blz. 1-6 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

9 Downloads (Pure)

Multivariable feedback control in stage synchronization

Lambregts, C. J. H., Heertjes, M. F. & Veek, van der, B. J., 2015, Proceedings of the 2015 American Control Conference (ACC), 1-3 July 2015, Chicago, Illinois. Piscataway: Institute of Electrical and Electronics Engineers, blz. 4149-4154

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Citaten (Scopus)
5 Downloads (Pure)

Performance trade-offs in disturbance feedforward compensation of active hard-mounted vibration isolators

Beijen, M. A., Heertjes, M. F., Butler, H. & Steinbuch, M., 2015, Proceedings of the 2015 American Control Conference (ACC), 1-3 July 2015, Chicago, Illinois. Piscataway: Institute of Electrical and Electronics Engineers, blz. 2149-2154

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

7 Citaten (Scopus)
14 Downloads (Pure)

Self-tuning disturbance feedforward control with drift prevention for air mount systems

Beijen, M. A., Heertjes, M. F. & Butler, H., 2015, 2015 IEEE Conference on Systems and Control (CCA 2015), September 21-23, 2015, Sydney, Australia : Proceedings. Piscataway: Institute of Electrical and Electronics Engineers, blz. 400-405

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

5 Citaten (Scopus)
16 Downloads (Pure)

Variable gains in motion control of wafer scanners

Heertjes, M. F., 2015, Proceedings of the International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015), 9-10 March 2015, Nagoya, Japan. s.l.: s.n., blz. 1-8

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

4 Downloads (Pure)
2014

Constrained iterative feedback tuning for robust high-precision motion control

van der Velden, B. J. C. H., Oomen, T. A. E. & Heertjes, M. F., 2014, Proceedings of the IFAC 19th Triennial World Congress, 24-29 August 2014, Cape Town, South Africa. Oxford: Pergamon, blz. 4915-4920

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

6 Citaten (Scopus)

Design of a fractional-order integrator for high-precision stages

van der Weijde, J. & Heertjes, M. F., 2014, Proceedings of the American Control Conference (ACC 2014), 4-6 june 2014, Portland, Oregon, United States.. Portland, OR: Institute of Electrical and Electronics Engineers, blz. 978-983

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

3 Downloads (Pure)

Finite element model reduction and model updating of structures for control

Dorosti, M., Fey, R. H. B., Heertjes, M. F., van de Wal, M. & Nijmeijer, H., 2014, Proceedings of the 19th World Congress of The International Federation of Automatic Control (IFAC), August 24-29, 2014, Cape Town, South Africa. blz. 4517-4522

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

7 Citaten (Scopus)
15 Downloads (Pure)

MIMO FIR feedforward design for zero error tracking control

Heertjes, M. F. & Bruijnen, D. J. H., 2014, Proceedings of the American Control Conference (ACC 2014), 4-6 june 2014, Portland, Oregon, United States.. Piscataway: Institute of Electrical and Electronics Engineers, blz. 2167-2171 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

13 Citaten (Scopus)

Robust data-driven control for the stage synchronization problem

Heertjes, M. F., Galluzzo, M. & Kuindersma, L., 2014, Preprints The 19th World Congress of the International Federation of Automatic Control(IFAC2014) Cape Town, South Africa. August 24-29, 2014. Xia, X. & Boje, E. (redactie). blz. 1134-1139 (IFAC Proceedings Volumes (IFAC-PapersOnline); vol. 19).

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Citaten (Scopus)
5 Downloads (Pure)

Self-tuning feedforward control for active vibration isolators

Beijen, M. A., Heertjes, M. F., van Dijk, J. & Hakvoort, W. B. J., 2014, 33rd Benelux meeting on Systems and Control : March 25-27, 2014, Heijen, The Netherlands. Book of Abstracts. Carloni, R., Lazar, M. & van den Boom, T. (redactie). Enschede: Twente University, blz. 130 1 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic

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32 Downloads (Pure)
2013

Learning in the synthesis of data-driven variable-gain controllers

Heertjes, M. F., Hunnekens, B. G. B., Wouw, van de, N. & Nijmeijer, H., 2013, 2013 ACC conference. Piscataway: Institute of Electrical and Electronics Engineers, blz. 6685-6690 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

4 Citaten (Scopus)

Model-based piecewise affine variable-gain controller synthesis

Hunnekens, B. G. B., Heertjes, M. F., Wouw, van de, N. & Nijmeijer, H., 2013, 2013 ACC Conference. Piscataway: Institute of Electrical and Electronics Engineers, blz. 6045-6050 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Citaten (Scopus)

Self-tuning in sliding mode control of high-precision motion systems

Heertjes, M. F. & Vardar, Y., 2013, 6th IFAC Symposium on Mechatronic Systems, 10-12 April 2013, Hangzhou, China. Oxford: Pergamon, blz. 13-19

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Citaten (Scopus)
8 Downloads (Pure)
2012

Data-based control tuning in master-slave systems

Heertjes, M. F. & Temizer, B., 2012, Proceedings of the 2012 American Control Conference (ACC 2012), 27-29 June 2012, Montréal, Canada. Piscataway: Institute of Electrical and Electronics Engineers, blz. 2461-2466

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

5 Citaten (Scopus)
3 Downloads (Pure)

Plant enhancements in motion systems by modal control

Durango Galvan, S. E., Heertjes, M. F. & Dunand, R., 2012, Proceedings of the 2012 American Control Conference (ACC 2012), 27-29 June 2012, Montréal, Canada. blz. 5348-5353

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

1 Citaat (Scopus)
3 Downloads (Pure)
2011

Multi-variable iterative tuning of a variable gain controller with application to a scanning stage system

Heertjes, M. F., Tepe, T. & Nijmeijer, H., 2011, Proceedings of the American Control Conference 2011. San Francisco, CA: Institute of Electrical and Electronics Engineers, blz. 816-820

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

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4 Citaten (Scopus)
81 Downloads (Pure)

Optimized switching control for fast motion systems with nanometer accuracy

Heertjes, M. F. & Mrkajic, B., 2011, Proceedings of the 7th European Nonlinear Dynamics Conference. Rome, Italy: EUROMECH, blz. 2 p.-

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

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36 Downloads (Pure)
2010

Optimal switching control of motion stages

Heertjes, M. F., Goch, van, B. & Nijmeijer, H., 2010, Proceedings of the 5th IFAC Symposium on Mechatronic Systems, 13-15 September 2010, Cambridge, Massachusetts, USA. Oxford: Pergamon

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Citaten (Scopus)

Optimized decoupling in active vibration isolation systems

Heertjes, M. F., Engelen, van, A. J. A. & Steinbuch, M., 2010, Proceedings of the 5th IFAC Symposium on Mechatronic Systems, 13-15 September 2010, Cambridge, Massachusetts, USA. Oxford: Pergamon

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Optimized dynamic decoupling in active vibration isolation

Heertjes, M. F., van Engelen, A. J. P. & Steinbuch, M., 1 jan 2010, 5th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2010 - Proceedings. 18 redactie IFAC Secretariat, Vol. 43. blz. 293-298 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Open Access

Optimized dynamic decoupling in scanning stage

Heertjes, M. F., Engelen, van, A. J. A. & Steinbuch, M., 2010, ASPE 3rd Meeting on the Control of Precision Systems, April 11 to 13, 2010. United States, Boston-Cambridge: American Society of Precision Engineering (ASPE), blz. 1-6

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2 Citaten (Scopus)
5 Downloads (Pure)
2009

Dynamic decoupling in motion systems using a gradient approximation-based algorithm

Heertjes, M. F., Hennekens, D. W. T., Engelen, van, A. J. A. & Steinbuch, M., 2009, Proceedings of the 48th IEEE Conference on Decision and Control and 28th Chinese Control Conference (CDC / CCC), 16-18 december 2009, Shanghai, China. Piscataway: Institute of Electrical and Electronics Engineers, blz. 5086-5091

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

9 Citaten (Scopus)
2 Downloads (Pure)