Als u wijzigingen in Pure hebt gemaakt, zullen deze hier binnenkort zichtbaar zijn.

Persoonlijk profiel


“The high-precision motion industry in general and the wafer scanning industry in particular are largely driven by linear control design. These designs inherently impose limitations in terms of control system performance, i.e. achievable bandwidths, overshoot, and settling times. Nonlinear control designs offer extra design freedom that can be used to break free from linear design limitations. This could enable future control system performances needed to support the technology roadmap in high-precision mechatronics.”

Research profile

Marcel Heertjes his primary affiliation is with ASML in the role of principle engineer and control competence leader. His main research interests are with industrial control for high-precision mechatronic systems with special focus on nonlinear control, feedforward and learning control, and data-driven optimization and self-tuning. His nonlinear control contributions and developments focus on full support of frequency-domain design, synthesis, loopshaping, and qualification tools that attempt at breaking free from linear control design limitations. His primary ambition is to provide a clear view on (a) robust nonlinear control design and stability analysis, and (b) the associated data-driven controller synthesis and tuning.

Academic background

Marcel Heertjes received both his MSc and PhD in mechanical engineering from Eindhoven University of Technology in 1995 and 1999, respectively. In 2000, he joined the Philips Centre for Industrial Technology in Eindhoven. In 2007 he joined ASML, Department of Mechatronic Systems Development, in Veldhoven, The Netherlands. He served as guest editor of International Journal of Robust and Nonlinear Control (2011)  and IFAC Mechatronics (2014) and currently is associate editor of IFAC Mechatronics (since 2016).  

Vingerafdruk Duik in de onderzoeksthema's waar Marcel F. Heertjes actief is. Deze onderwerplabels komen voort uit het werk van deze persoon. Samen vormen ze een unieke vingerafdruk.

Controllers Engineering en materiaalwetenschappen
Tuning Engineering en materiaalwetenschappen
Feedforward control Engineering en materiaalwetenschappen
Frequency response Engineering en materiaalwetenschappen
Motion control Engineering en materiaalwetenschappen
Feedback Engineering en materiaalwetenschappen
Impulse response Engineering en materiaalwetenschappen
Disturbance rejection Engineering en materiaalwetenschappen

Netwerk Recente externe samenwerking op landenniveau. Duik in de details door op de stippen te klikken.

Onderzoeksoutput 1997 2019

Hybrid integral reset control with application to a lens motion system

Gruntjens, K. G. J., Heertjes, M. F., van Loon, S. J. L. M., van de Wouw, N. & Heemels, W. P. M. H., 1 jul 2019, 2019 American Control Conference, ACC 2019. Piscataway: Institute of Electrical and Electronics Engineers, blz. 2408-2413 6 blz. 8815268

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Disturbance rejection
Three term control systems
Frequency response
1 Downloads (Pure)

Hybrid integrator-gain system for active vibration isolation with improved transient response

Heertjes, M., van den Eijnden, S., Sharif, B., Heemels, M. & Nijmeijer, H., 2019, In : IFAC-PapersOnLine. 52, 15, blz. 454-459

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

Open Access
1 Citaat (Scopus)
9 Downloads (Pure)

Mixed feedback and feedforward control design for multi-axis vibration isolation systems

Beijen, M. A., Heertjes, M. F., Butler, H. & Steinbuch, M., 1 aug 2019, In : Mechatronics. 61, blz. 106-116 11 blz.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

Feedforward control
Feedback control
2 Citaties (Scopus)
4 Downloads (Pure)

Robust control and data-driven tuning of a hybrid integrator-gain system with applications to wafer scanners

Heertjes, M. F., Irigoyen Perdiguero, N. & Deenen, D. A., 1 feb 2019, In : International Journal of Adaptive Control and Signal Processing. 33, 2, blz. 371-387 17 blz.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

Robust control
Frequency response
Disturbance rejection

Robust stability and nonlinear loop-shaping design for hybrid integrator-gain-based control systems

van den Eijnden, S. J. A. M., Heertjes, M. F. & Nijmeijer, H., 1 jul 2019, 2019 American Control Conference, ACC 2019. Piscataway: Institute of Electrical and Electronics Engineers, blz. 3063-3068 6 blz. 8814888

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Control systems
Describing functions
Motion control
Lyapunov functions
Linear matrix inequalities



Henk Nijmeijer and Nathan van de Wouw receive CST Award

H. Nijmeijer, M. Steinbuch & Marcel F. Heertjes


1 item van Media-aandacht

Pers / media: Vakinhoudelijk commentaar


Active vibration isolation with sliding mode control

Auteur: van Gils, D., 30 jun 2014

Begeleider: Heertjes, M. (Afstudeerdocent 1) & Nijmeijer, H. (Afstudeerdocent 2)

Scriptie/masterproef: Master

An analysis towards shock robustness in an optical disc drive

Auteur: Coolen, R., 30 sep 2003

Begeleider: Steinbuch, M. (Afstudeerdocent 1), Homburg, F. (Afstudeerdocent 2), Nuij, P. (Afstudeerdocent 2), Leenknegt, G. (Afstudeerdocent 2), Heertjes, M. (Afstudeerdocent 2) & Cremers, F. (Externe persoon) (Afstudeerdocent 2)

Scriptie/masterproef: Master

A scheduled control design for motion stages with varying sensor configurations

Auteur: van der Weijst, R., 31 dec 2014

Begeleider: Heertjes, M. (Afstudeerdocent 1), van Loon, S. (Afstudeerdocent 2) & Heemels, W. (Afstudeerdocent 2)

Scriptie/masterproef: Master

A variable gain controller with reset properties

Auteur: Gruntjens, K., 31 aug 2015

Begeleider: Steinbuch, M. (Afstudeerdocent 1) & Heertjes, M. (Afstudeerdocent 2)

Scriptie/masterproef: Master

A zero dynamics based approach to actuator positioning: controlling a beam with one-sided spring

Auteur: Sanders, L., 30 apr 1997

Begeleider: Kok, J. (Afstudeerdocent 1), Heertjes, M. (Afstudeerdocent 2) & van de Molengraft, M. (Afstudeerdocent 2)

Scriptie/masterproef: Master