• 833 Citaties

Research output per year

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Persoonlijk profiel


“The high-precision motion industry in general and the wafer scanning industry in particular are largely driven by linear control design. These designs inherently impose limitations in terms of control system performance, i.e. achievable bandwidths, overshoot, and settling times. Nonlinear control designs offer extra design freedom that can be used to break free from linear design limitations. This could enable future control system performances needed to support the technology roadmap in high-precision mechatronics.”

Research profile

Marcel Heertjes his primary affiliation is with ASML in the role of principle engineer and control competence leader. His main research interests are with industrial control for high-precision mechatronic systems with special focus on nonlinear control, feedforward and learning control, and data-driven optimization and self-tuning. His nonlinear control contributions and developments focus on full support of frequency-domain design, synthesis, loopshaping, and qualification tools that attempt at breaking free from linear control design limitations. His primary ambition is to provide a clear view on (a) robust nonlinear control design and stability analysis, and (b) the associated data-driven controller synthesis and tuning.

Academic background

Marcel Heertjes received both his MSc and PhD in mechanical engineering from Eindhoven University of Technology in 1995 and 1999, respectively. In 2000, he joined the Philips Centre for Industrial Technology in Eindhoven. In 2007 he joined ASML, Department of Mechatronic Systems Development, in Veldhoven, The Netherlands. He served as guest editor of International Journal of Robust and Nonlinear Control (2011)  and IFAC Mechatronics (2014) and currently is associate editor of IFAC Mechatronics (since 2016).  

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Conformal slip-free wafer chucking using an actuated wafer table

Hermanussen, S. J., Habets, M. B. I., Heertjes, M. F. & Vermeulen, J. P. M. B., 10 feb 2020, 2019 7th International Conference on Control, Mechatronics and Automation (ICCMA). Piscataway: Institute of Electrical and Electronics Engineers, blz. 278-282 5 blz. 8988610

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

  • Everything is under control

    Heertjes, M. F., 6 mrt 2020, Eindhoven: Technische Universiteit Eindhoven. 24 blz.

    Onderzoeksoutput: Boek/rapportInaugurale redeAcademic

    Open Access

    Hybrid integral reset control with application to a lens motion system

    Gruntjens, K. G. J., Heertjes, M. F., van Loon, S. J. L. M., van de Wouw, N. & Heemels, W. P. M. H., 1 jul 2019, 2019 American Control Conference, ACC 2019. Piscataway: Institute of Electrical and Electronics Engineers, blz. 2408-2413 6 blz. 8815268

    Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

  • Hybrid integrator-gain system for active vibration isolation with improved transient response

    Heertjes, M., van den Eijnden, S., Sharif, B., Heemels, M. & Nijmeijer, H., sep 2019, In : IFAC-PapersOnLine. 52, 15, blz. 454-459 6 blz.

    Onderzoeksoutput: Bijdrage aan tijdschriftCongresartikelAcademicpeer review

    Open Access
    12 Downloads (Pure)

    Mixed feedback and feedforward control design for multi-axis vibration isolation systems

    Beijen, M. A., Heertjes, M. F., Butler, H. & Steinbuch, M., 1 aug 2019, In : Mechatronics. 61, blz. 106-116 11 blz.

    Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

  • 1 Citaat (Scopus)
    9 Downloads (Pure)



    Henk Nijmeijer and Nathan van de Wouw receive CST Award

    H. Nijmeijer, M. Steinbuch & Marcel F. Heertjes


    1 item van Media-aandacht

    Pers / media: Vakinhoudelijk commentaar


    Active vibration isolation with sliding mode control

    Auteur: van Gils, D., 30 jun 2014

    Begeleider: Heertjes, M. (Afstudeerdocent 1) & Nijmeijer, H. (Afstudeerdocent 2)

    Scriptie/masterproef: Master

    An analysis towards shock robustness in an optical disc drive

    Auteur: Coolen, R., 30 sep 2003

    Begeleider: Steinbuch, M. (Afstudeerdocent 1), Homburg, F. (Afstudeerdocent 2), Nuij, P. (Afstudeerdocent 2), Leenknegt, G. (Afstudeerdocent 2), Heertjes, M. (Afstudeerdocent 2) & Cremers, F. (Externe persoon) (Afstudeerdocent 2)

    Scriptie/masterproef: Master

    A scheduled control design for motion stages with varying sensor configurations

    Auteur: van der Weijst, R., 31 dec 2014

    Begeleider: Heertjes, M. (Afstudeerdocent 1), van Loon, S. (Afstudeerdocent 2) & Heemels, W. (Afstudeerdocent 2)

    Scriptie/masterproef: Master

    A variable gain controller with reset properties

    Auteur: Gruntjens, K., 31 aug 2015

    Begeleider: Steinbuch, M. (Afstudeerdocent 1) & Heertjes, M. (Afstudeerdocent 2)

    Scriptie/masterproef: Master

    A zero dynamics based approach to actuator positioning: controlling a beam with one-sided spring

    Auteur: Sanders, L., 30 apr 1997

    Begeleider: Kok, J. (Afstudeerdocent 1), Heertjes, M. (Afstudeerdocent 2) & van de Molengraft, M. (Afstudeerdocent 2)

    Scriptie/masterproef: Master