Onderzoeksoutput per jaar
Onderzoeksoutput per jaar
- 40 resultaten
Zoekresultaten
-
2024
Particle mobilization by EUV-induced plasma and fast electrons
van de Kerkhof, M., Shefer, D., Nikipelov, A., Sbrizzai, F., Kvon, V., Bouwmans, S., Beckers, J. & Banine, V., 10 apr. 2024, Optical and EUV Nanolithography XXXVII. Burkhardt, M. & van Lare, C. (uitgave). SPIE, 10 blz. 129530E. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12953).Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
1 Downloads (Pure) -
2023
Residual Microparticle Charge Measured in a Spatio-Temporal Afterglow Plasma
Van Huijstee, J. C. A., Blom, P. & Beckers, J., 5 apr. 2023, 2023 IEEE International Conference on Plasma Science, ICOPS 2023. Institute of Electrical and Electronics Engineers, 1 blz. 10481077Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
-
The role of neutral drag force in pulsed plasma enabled particle contamination control
Beckers, J., van Huijstee, J., Blom, P., Medini, F. & Peijnenburg, T., 2023, Metrology, Inspection, and Process Control XXXVII. Robinson, J. C. & Sendelbach, M. J. (uitgave). SPIE, blz. 1-7 7 blz. 1249631. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12496).Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
4 Citaten (Scopus)4 Downloads (Pure) -
2022
Cyclic Dust Formation and Growth in a Low-Pressure, Radio-Frequency Driven Argon-Hexamethyldisiloxane Plasma
Donders, T. J. M., Staps, T. J. A. & Beckers, J., 6 jul. 2022, 2022 IEEE International Conference on Plasma Science, ICOPS 2022. Institute of Electrical and Electronics Engineers, 1 blz. 9813012Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
4 Downloads (Pure) -
2021
Morphology change and release of tin and lead micro-particles from substrates in hydrogen plasma
Shefer, D., Nikipelov, A., van de Kerkhof, M., Banine, V. & Beckers, J., 2021, Extreme Ultraviolet (EUV) Lithography XII. Felix, N. M. & Lio, A. (uitgave). SPIE, 8 blz. 116091F. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11609).Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
3 Citaten (Scopus) -
Plasma assisted particle contamination control: Plasma charging dependence on particle morphology
van Huijstee, J. C. A., van Minderhout, B., Rompelberg, R. M. H., Blom, P., Peijnenburg, T. & Beckers, J., 2021, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. Adan, O. & Robinson, J. C. (uitgave). SPIE, 6 blz. 116113A. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11611).Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
2 Citaten (Scopus) -
2020
Particle contamination control by application of plasma
Beckers, J., van Minderhout, B., Blom, P. P. M., Kroesen, G. M. W. & Peijnenburg, T., 23 mrt. 2020, Extreme Ultraviolet (EUV) Lithography XI. Felix, N. M. & Lio, A. (uitgave). SPIE, 6 blz. 113232L. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11323).Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
Open AccessBestand15 Citaten (Scopus)304 Downloads (Pure) -
2015
EUV photons induced plasma
Beckers, J., 2015, XXXII International Conference on Phenomena in Ionized Gases, 26-31 July 2015, Iasi, Romania.Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
-
Exploring light scattering on dusty plasmas to improve color management in white LEDs
Schepers, L. P. T., Beckers, J., Tukker, T. W. & IJzerman, W. L., 11 mrt. 2015, 27th Symposium on Plasma Physics & Radiation Technology: Book of Abstracts. Dutch Physical Society, 1 blz. B7Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
Open AccessBestand71 Downloads (Pure) -
Fast and interrupted expansion in cyclic void growth in a dusty plasma
Wetering, van de, F. M. J. H., Brooimans, R. J. C., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2015, Proceedings of the 27th Symposium Plasma Physics & Radiation Technology, 10-11 March 2015, Lunteren, the Netherlands.Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
Open AccessBestand145 Downloads (Pure) -
Light scattering on dusty plasmas : how to improve the quality of white LEDs?
Schepers, L. P. T., Beckers, J., Tukker, T. W. & IJzerman, W. L., 2015, 2015 IEEE International Conference on Plasma Sciences (ICOPS, Antalya, Turkey, May 24-28, 2015). Piscataway: Institute of Electrical and Electronics Engineers, blz. 1-1Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
9 Downloads (Pure) -
The temporal evolution of electrons in EUV-induced plasmas
Horst, van der, R. M., Beckers, J., Osorio, E. A. & Banine, V. Y., 28 jul. 2015, Proceedings of the 32st International Conference of Plasmas and Ionized Gases.Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
Open AccessBestand71 Downloads (Pure) -
2014
Electron density in an Extreme Ultra-Violet generated plasma
Horst, van der, R. M., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014, Presentation at the congress of Physics@FOM, January 21-22, 2014, Veldhoven, The Netherlands.Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
Open AccessBestand78 Downloads (Pure) -
Plasma and nanoparticles in cylindrical microwave cavities
Wetering, van de, F. M. J. H., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014, Proceedings of the 26th Symposium Plasma Physics & Radiation Technology, 11-12 March 2014, Lunteren, the Netherlands. blz. 79-79Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
Open AccessBestand75 Downloads (Pure) -
The electron density in an EUV-generated plasma
Horst, van der, R. M., Beckers, J., Nijdam, S., Osorio, E. A., Banine, V. Y. & Kroesen, G. M. W., 2014, Presentation at the CP3E, 27-5-2014, Veldhoven, The Netherlands.Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
-
The electron density in an EUV-generated plasma in hydrogen
Horst, van der, R. M., Beckers, J., Nijdam, S. & Kroesen, G. M. W., 2014, 2014 International Symposium on Extreme Ultraviolet Lithography, October 27-29 2014, Washington DC. Washingthon DCOnderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
-
Void dynamics in low-pressure acetylene RF plasmas
Wetering, van de, F. M. J. H., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2014, Dutch Physics Conference, Physics@FOM, 21-22 January 2014, Veldhoven, The Netherlands. blz. 39-39Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
-
2013
Electron density in Extreme Ultra-Violet generated plasmas
Horst, van der, R. M., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2013, Presentation at the 16th Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-16), 21-22 November 2013, Kerkrade, The Netherlands.Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
-
Void dynamics in low-pressure acetylene RF plasmas
Wetering, van de, F. M. J. H., Brooimans, R. J. C., Nijdam, S., Beckers, J. & Kroesen, G., 2013, Proceedings of the 16th Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-16), 21-22 November 2013, Kerkrade, The Netherlands. blz. 10-10Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
-
Void dynamics in low-pressure acetylene RF plasmas
Wetering, van de, F. M. J. H., Nijdam, S., Beckers, J. & Kroesen, G. M. W., 2013, Proceedings of the 66th Annual Gaseous Electronics Conference (GEC), September 30 - October 4, 2013, Princeton, New Jersey. American Physical Society, blz. DTI 5- (Bulletin of the American Physical Society; vol. 58).Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
Open AccessBestand57 Downloads (Pure) -
2012
Dust particle charge and screening in the collisional RF plasma sheath
Beckers, J., Trienekens, D. J. M. & Kroesen, G. M. W., 2012, Presentation at the 65th Gaseous Electronics Conference October 22-26 2012, Austin Texas, USA. Sprouse, G. D. (uitgave). American Physical Society, blz. 19-19 (Bulletin of the American Physical Society; vol. 57).Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
1 Downloads (Pure) -
Electric fields measurements in the collisional RF plasma pre-sheath during microgravity conditions
Beckers, J., Trienekens, D. J. M. & Kroesen, G. M. W., 2012, Presentation at the 65th Gaseous Electronics Conference, October 22-26 2012, Austin Texas, USA. Sprouse, G. D. (uitgave). American Physical Society, blz. 29-29 (Bulletin of the American Physical Society; vol. 57).Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
Open AccessBestand59 Downloads (Pure) -
Ethynyl anion dynamics in the first 10 milliseconds of an argon-acetylene radio-frequency plasma
Wetering, van de, F. M. J. H., Beckers, J. & Kroesen, G. M. W., 2012, Presentation held at Physics@FOM, 17-18 January, 2012, Veldhoven, the Netherlands.Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
-
2011
Probing the first stage of dust formation in argon/acetylene plasmas using laser-induced photodetachment
Wetering, van de, F. M. J. H., Beckers, J. & Kroesen, G. M. W., 2011, Proceedings of the 23rd Symposium Plasma Physics & Radiation Technology, 15-16 March 2011, Lunteren, The Netherlands. blz. 28 (O 6)-Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
Open AccessBestand38 Downloads (Pure) -
2010
Electric field measurements in the sheath of an argon RF discharge by probing with microparticles under varying gravity conditions
Beckers, J., Stoffels, W. W., Kroesen, G. M. W., Ockenga, T., Wolter, M. & Kersten, H., 2010, Proceedings of the 37th International Conference on Plasma Science (ICOPS 2010), 20–24 June 2010, Norfolk, Virginia, USA. blz. 7A-6-1Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
Open AccessBestand164 Downloads (Pure) -
Laser-induced photodetachment in Ar/C2H2 and Ar/CH4 plasmas
Wetering, van de, F. M. J. H., van Mourik, M. W., Beckers, J. & Kroesen, G. M. W., 2010, Proceedings of the 13th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-13 2010), 25-26 November 2010, Kerkrade, The Netherlands. blz. P31-Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
3 Downloads (Pure) -
Microparticles in a collisional RF plasma sheath under hypergravity conditions as probes for the electric field strength and the particle charge
Beckers, J., Ockenga, T., Wolter, M., Stoffels, W. W., Kersten, H. & Kroesen, G. M. W., 2010, Proceedings of the 13th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-13 2010), 25-26 November 2010, Kerkrade, The Netherlands. blz. P2-Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
1 Downloads (Pure) -
Spatially resolved electric field measurements in a RF-plasma sheath by probing micro-particles under hyper-gravity conditions
Beckers, J., Ockenga, T., Wolter, M., Stoffels, W. W., Kroesen, G. M. W. & Kersten, H., 2010, Proceedings of the 24th Symposium on Plasma Physics and Technology, June 14-17, 2010, Prague, Czech Republic. Prague, Czech RepublicOnderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
-
2009
Gas temperature dependence powder formation and growth in low pressure acetylene RF discharges
Beckers, J., Wolter, M., Stoffels, W. W. & Kroesen, G. M. W., 2009, Proceedings 19th International Symposium on Plasma Chemistry (ISPC 19), 26-31 July 2009, Bochum, Germany. Bochum, Germany: ISPC, blz. P3.9.8-1/4Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
-
Micrometer sized dust particles in a fr plasma under varying gravity conditions
Beckers, J., Stoffels, W. W., Kroesen, G. M. W., Ockenga, T., Wolter, M. & Kersten, H., 2009, Proceedings of the 21th NNV-Symposium Plasma Physics & Radiation Technology 2009, 3-4 March 2009, Lunteren, The Netherlands. Lunteren, The Netherlands, blz. B3-Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
-
Microparticles in a RF plasma under hyper gravity conditions
Beckers, J., Stoffels, W. W., Ockenga, T., Wolter, M. & Kersten, H., 2009, IEEE International Conference on Plasma Science (ICOPS 2009) , 1-5 June 2009, San Diego, CA. Piscataway NJ: Institute of Electrical and Electronics Engineers, blz. 5227229-Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
Open AccessBestand2 Citaten (Scopus)180 Downloads (Pure) -
Powder growth in low pressure Ar/CH4 and Ar/C2H2 rf discharges
Beckers, J. & Stoffels, W. W., 2009, Proceedings 19th International Symposium on Plasma Chemistry (ISPC 19), 26-31 July 2009, Bochum, Germany. Bochum, Germany: ISPC, blz. P3.9.8-571Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
1 Downloads (Pure) -
Powder growth in low pressure Ar/CH4 and AR/C2H2 rf discharges
Beckers, J. & Stoffels, W. W., 2009, Proceedings of the 21th NNV-Symposium Plasma Physics & Radiation Technology 2009, 3-4 March 2009, Lunteren, The Netherlands. Lunteren, The Netherlands, blz. B4-Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
-
Spatially resolved electric field measurements in the RF plasma sheath by using micro particles as electrostatic probes
Roelfsema, E., Wit, de, E. H. B. J. M., Beckers, J. & Kroesen, G. M. W., 2009, Proceedings of the 12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-12 2009), 26-27 November 2009, Kerkrade, The Netherlands. Kerkrade, The Netherlands, blz. P47-Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
-
2008
Early formation of nanometer-sized dust particles in RF methane plasmas
Beckers, J., Vacaresse, G. D. G. J. & Stoffels, W. W., 2008, Proceedings of the 20st Symposium Plasma Physics & Radiation Technology 2008, 4-5 March 2008, Lunteren, The Netherlands.Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
-
Formation processes of nanometer sized particles in low pressure Ar/CH4 rf plasmas
Beckers, J., Vacaresse, G. D. G. J. & Stoffels, W. W., 2008, Multifacets of dusty plasmas : Fifth International Conference on the Physics of Dusty Plasmas, (ICPDP-5) 18 - 23 May 2008 Ponta Delgada, [San Miguel]Azores, Portugal. Mendonça, J. T. & Resendes, D. P. (uitgave). Melville, NY: American Institute of Physics, blz. 163-164 (AIP Conference Proceedings; vol. 1041).Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
2 Downloads (Pure) -
Temperature dependence of dust particle formation in low pressure argon/methane RF discharge
Beckers, J., Vacaresse, G. D. G. J., Cox, M. & Stoffels, W. W., 2008, Proceedings of the 11th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-11 2008), 13-14 November 2008, Kerkrade, The Netherlands. Kerkrade, The Netherlands, blz. P23-Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
5 Downloads (Pure) -
2007
Pulse, DC and AC ignition of metal halide lamps
Beckers, J., Manders, F., Stoffels, W. W. & Haverlag, M., 2007, Proceedings of the 10th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-10 2007), 15-16 November 2007, Kerkrade, The Netherlands. blz. P 37-Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
1 Downloads (Pure) -
Resonant ignition of HID lamps
Beckers, J., 2007, Proceedings of the Meeting at the Ruhr Universität Bochum, Allgemeine Elektrotechnik und Plasmatechnik, Research group of Prof. Awakowicz, 13 June, 2007, Bochum, Germany.Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
-
2005
Metal halide discharge lamps under micro gravity conditions
Stoffels, W. W., Kroesen, G. M. W., Groothuis, C. H. J. M., Flikweert, A. J., Nimalasuriya, T., van Kemenade, M., Kemps, P. C. M., Bax, M. W. G., van den Hout, F. H. J., van den Akker, D., Schiffelers, G. C. S., Beckers, J., Dekkers, E., Moerel, J., Brinkgreve, P., Haverlag, M., Keijser, R. & Kuipers, A., 2005, Proceedings of the 27th International Conference on Phenomena in Ionised Gases (XXVII ICPIG 2005) 17-22 July 2005, Eindhoven, the Netherlands. Veldhuizen, van, E. M. (uitgave). Eindhoven: Eindhoven University of Technology, blz. 16-343-1/4Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
4 Downloads (Pure)