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Persoonlijk profiel

Quote

The complexity of a lithographic tool, in our field requiring sub-nanometer positioning accuracy while exerting thousands of Newtons, continues to amaze. Its success requires teamwork of people in all disciplines.

Research profile

Hans Butler is a part-time professor in the Control Systems group of the Department of Electrical Engineering at Eindhoven University of Technology. He specializes in lithographic scanner control, an area of expertise he has built through a long career at ASML, where he is also a Fellow. Butler is a specialist in dynamics and control systems. 

As a control engineer, Butler has worked at ASML on multiple components of lithographic tools, such as handlers, illuminators, projection systems and stages. Within ASML's Mechatronic Systems Development Department, he has led groups working on actuators, opto-mechatronics, and vibration isolation and damping. Butler is an ASML fellow with dynamics and control as main focus area, in particular in relation to the imaging process. Improving the positioning accuracy from a perspective of dynamics and control has always been the guiding interest throughout his career.  

 

Academic background

Hans Butler holds an MSc (1986) and PhD (1990) degree from Delft University of Technology. In 1991, he joined ASML, where he has led groups working on actuators, opto-mechatronics, dynamics, vibration isolation and damping. In 2002, he became group leader of the Drives group, moving to the System Dynamics group in 2006. In 2010, Butler became an ASML fellow. In 2012 he was appointed part-time professor in Lithographic Scanner Control at Eindhoven University of Technology.

Vingerafdruk Duik in de onderzoeksthema's waar Hans Butler actief is. Deze onderwerplabels komen voort uit het werk van deze persoon. Samen vormen ze een unieke vingerafdruk.

Feedforward control Engineering en materiaalwetenschappen
Controllers Engineering en materiaalwetenschappen
Linear motors Engineering en materiaalwetenschappen
Feedback Engineering en materiaalwetenschappen
Electric commutation Engineering en materiaalwetenschappen
Actuators Engineering en materiaalwetenschappen
Linear Motor Rekenkunde
Disturbance rejection Engineering en materiaalwetenschappen

Netwerk Recente externe samenwerking op landenniveau. Duik in de details door op de stippen te klikken.

Onderzoeksoutput 1999 2019

43 Downloads (Pure)

Active compensation of the deformation of a magnetically levitated mover of a planar motor

Custers, C., Proimadis, I., Jansen, J. W., Butler, H., Toth, R., Lomonova, E. & Van den Hof, P., mei 2019, 2019 IEEE International Electric Machines and Drives Conference, IEMDC 2019. Piscataway: Institute of Electrical and Electronics Engineers, blz. 854-861 8 blz. 8785302

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Open Access
Bestand
commutation
coils
flexible bodies
translators
stators
1 Citaat (Scopus)
8 Downloads (Pure)

Mixed feedback and feedforward control design for multi-axis vibration isolation systems

Beijen, M. A., Heertjes, M. F., Butler, H. & Steinbuch, M., 1 aug 2019, In : Mechatronics. 61, blz. 106-116 11 blz.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

Feedforward control
Feedback control
Feedback
Amplification
Sensors
1 Citaat (Scopus)

A method to guarantee local convergence for sequential quadratic programming with poor Hessian approximation

Nguyen, T. T., Lazar, M. & Butler, H., 18 jan 2018, 2017 IEEE 56th Annual Conference on Decision and Control, CDC 2017. Piscataway: Institute of Electrical and Electronics Engineers, blz. 3781-3786 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Quadratic programming
Local Convergence
Quadratic Programming
Approximation
Nonlinear Optimization
4 Downloads (Pure)

An instrumental variable method for closed-loop identification of coreless linear motors

Nguyen, T. T., Lazar, M., Butler, H. & Van den Hof, P. M. J., 9 aug 2018, 2018 Annual American Control Conference, ACC 2018. Institute of Electrical and Electronics Engineers, Vol. 2018-June. blz. 5219-5224 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Linear motors
Dynamical systems
Demonstrations
4 Citaties (Scopus)
7 Downloads (Pure)

Disturbance feedforward control for active vibration isolation systems with internal isolator dynamics

Beijen, M. A., Heertjes, M. F., Butler, H. & Steinbuch, M., 8 dec 2018, In : Journal of Sound and Vibration. 436, blz. 220-235 16 blz.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

feedforward control
Feedforward control
isolators
isolation
controllers

Cursussen

Scriptie

Active damping for charge driven piezoelectric nanopositioning stage using self sensing control

Auteur: Di Filippo, R., 19 sep 2018

Begeleider: Weiland, S. (Afstudeerdocent 1), Butler, H. (Afstudeerdocent 2), Jansen, B. (Externe coach) & Vandervelden, R. (Externe persoon) (Externe coach)

Scriptie/masterproef: Master

Active damping of lenstop vibrations

Auteur: Verbeek, T., 31 dec 2000

Begeleider: Butler, H. (Afstudeerdocent 1), Damen, A. (Afstudeerdocent 2) & Heemels, W. (Afstudeerdocent 2)

Scriptie/masterproef: Master

Bestand

Adaptive friction compensation for an industrial coreless linear motor setup

Auteur: van den Boom, P., 13 dec 2018

Begeleider: Nguyen, T. (Afstudeerdocent 1), Lazar, M. (Afstudeerdocent 2) & Butler, H. (Afstudeerdocent 2)

Scriptie/masterproef: Master

Adaptive observer for state and parameter estimation applied to a wafe stage

Auteur: Aslan, O., 31 aug 2015

Begeleider: Butler, H. (Afstudeerdocent 1)

Scriptie/masterproef: Master

Control design based on a 6DoF model of a Gaussmount vibration isolation system using relative and absolute motion sensors with their frequency domain performance limitations

Auteur: López Martínez, C., 31 aug 2010

Begeleider: Ding, C. (Afstudeerdocent 1), van den Bosch, P. (Afstudeerdocent 2) & Butler, H. (Externe coach)

Scriptie/masterproef: Master