Hans Butler

Persoonlijk profiel

Quote

The complexity of a lithographic tool, in our field requiring sub-nanometer positioning accuracy while exerting thousands of Newtons, continues to amaze. Its success requires teamwork of people in all disciplines.

Research profile

Hans Butler is a part-time professor in the Control Systems group of the Department of Electrical Engineering at Eindhoven University of Technology. He specializes in lithographic scanner control, an area of expertise he has built through a long career at ASML, where he is also a Fellow. Butler is a specialist in dynamics and control systems.

As a control engineer, Butler has worked at ASML on multiple components of lithographic tools, such as handlers, illuminators, projection systems and stages. Within ASML's Mechatronic Systems Development Department, he has led groups working on actuators, opto-mechatronics, and vibration isolation and damping. Butler is an ASML fellow with dynamics and control as main focus area, in particular in relation to the imaging process. Improving the positioning accuracy from a perspective of dynamics and control has always been the guiding interest throughout his career.

Academic background

Hans Butler holds an MSc (1986) and PhD (1990) degree from Delft University of Technology. In 1991, he joined ASML, where he has led groups working on actuators, opto-mechatronics, dynamics, vibration isolation and damping. In 2002, he became group leader of the Drives group, moving to the System Dynamics group in 2006. In 2010, Butler became an ASML fellow. In 2012 he was appointed part-time professor in Lithographic Scanner Control at Eindhoven University of Technology.

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Onderzoeksoutput

391 Citaties
22 Conferentiebijdrage
10 Tijdschriftartikel
3 Congresartikel
1 Inaugurale rede
1 Meer
- 1 Abstract

Active compensation of the deformation of a magnetically levitated mover of a planar motor

Custers, C., Proimadis, I., Jansen, J. W. H., Butler, H., Toth, R., Lomonova, E. & Van den Hof, P., mei 2019, 2019 IEEE International Electric Machines and Drives Conference, IEMDC 2019. Piscataway: Institute of Electrical and Electronics Engineers, blz. 854-861 8 blz. 8785302

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

Open Access

Bestand

76 Downloads (Pure)

Data-driven neural feedforward controller design for industrial linear motors

Yuen, Y. H., Lazar, M. & Butler, H., okt 2019, 2019 23rd International Conference on System Theory, Control and Computing, ICSTCC 2019 - Proceedings. Precup, R-E. (redactie). Piscataway: Institute of Electrical and Electronics Engineers, blz. 461-467 7 blz. 8885434. (2019 23rd International Conference on System Theory, Control and Computing, ICSTCC 2019 - Proceedings).

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

3 Downloads (Pure)

Mixed feedback and feedforward control design for multi-axis vibration isolation systems

Beijen, M. A., Heertjes, M. F., Butler, H. & Steinbuch, M., 1 aug 2019, In : Mechatronics. 61, blz. 106-116 11 blz.

Onderzoeksoutput: Bijdrage aan tijdschrift › Tijdschriftartikel › Academic › peer review

1 Citaat (Scopus)

9 Downloads (Pure)

A method to guarantee local convergence for sequential quadratic programming with poor Hessian approximation

Nguyen, T. T., Lazar, M. & Butler, H., 18 jan 2018, 2017 IEEE 56th Annual Conference on Decision and Control, CDC 2017. Piscataway: Institute of Electrical and Electronics Engineers, blz. 3781-3786 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

1 Citaat (Scopus)

An instrumental variable method for closed-loop identification of coreless linear motors

Nguyen, T. T., Lazar, M., Butler, H. & Van den Hof, P. M. J., 9 aug 2018, 2018 Annual American Control Conference, ACC 2018. Institute of Electrical and Electronics Engineers, Vol. 2018-June. blz. 5219-5224 6 blz.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

1 Citaat (Scopus)

4 Downloads (Pure)

Cursussen

Selected topics in systems and control

1/09/15 → …

Cursus

Knipsels