NanoLabTUe is an expert group providing a good and safe working environment with state-of-the art facilities and services to enable internal and external customers performing cutting-edge research and development in the field of nanofabrication.

With its extensive laboratory facilities, the NanoLabTUe offers a wide spectrum of opportunities for research and development activities

The NanoLabTUe hosts both elite academic research and a multitude of industrial collaborations. It is an open-access research laboratory, available to TU/e, other research centers and industrial partners. This approach helps fundamental research insights quickly find their way into industry. Some examples of the fundamental research topics in the NanoLabTUe: nanowires, single-photon emitters, photonic integrated circuits and the fabrication of ultrathin layers with top-of-the-line atomic layer deposition equipment.

Unique cleanroom expertise

The NanoLabTUe facilities include an 800 m² fully equipped cleanroom (ISO class 6) with state-of-the-art equipment. Within that cleanroom, there is a separate lithography section. Unique in the Netherlands and even the world, the NanoLabTUe has an ASML scanner to produce features as small as 100 nm on 3-inch indium phosphide wafers. In addition, the NanoLabTUe also has expert functions in processing of III/V semiconductors and especially in epitaxial growth of the materials.

Additional facilities and support

Additional labs hold scanning electron microscopes and nano-prototyping and bonding equipment. A wide range of atomic layer deposition equipment is also available.

A staff of professional engineers and experts offers skillful technical support. NanoLabTUe is located at the TU/e Campus in the center of Eindhoven and is easily accessible either by car or public transport.