Introductie / missie

The NanoLab@TU/e is a world-class facility for fundamental research. It plays an important role in the research carried out at Eindhoven University of Technology (TU/e) and supports nanotechnology research and innovation throughout the Netherlands.

Highlighted phrase

With its extensive laboratory facilities, the NanoLab@TU/e offers a wide spectrum of opportunities for research and development activities

Over de organisatie

The NanoLab@TU/e hosts both elite academic research and a multitude of industrial collaborations. It is an open-access research laboratory, available to TU/e, other research centers and industrial partners. This approach helps fundamental research insights quickly find their way into industry. Some examples of the fundamental research topics in the NanoLab@TU/e: nanowires, single-photon emitters, photonic integrated circuits and the fabrication of ultrathin layers with top-of-the-line atomic layer deposition equipment.

Unique cleanroom expertise

The NanoLab@TU/e facilities include an 800 m2 fully equipped cleanroom (ISO class 6) with state-of-the-art equipment. Within that cleanroom, there is a separate lithography section. Unique in the Netherlands and even the world, the NanoLab@TU/e has an ASML scanner to produce features as small as 100 nm on 3-inch indium phosphide wafers. In addition, the NanoLab@TU/e also has expert functions in processing of III/V semiconductors and especially in epitaxial growth of the materials.

Additional facilities and support

Additional labs hold scanning electron microscopes and nano-prototyping and bonding equipment. A wide range of atomic layer deposition equipment is also available.

A staff of professional engineers and experts offers skillful technical support. NanoLab@TU/e is located at the TU/e Campus in the center of Eindhoven and is easily accessible either by car or public transport.

Vingerafdruk Duik in de onderzoeksthema's waar NanoLab@TU/e actief is. Deze onderwerplabels komen voort uit het werk van deze leden van de organisatie. Samen vormen ze een unieke vingerafdruk.

Photonics Engineering en materiaalwetenschappen
photonics Fysica en Astronomie
integrated circuits Fysica en Astronomie
Integrated circuits Engineering en materiaalwetenschappen
waveguides Fysica en Astronomie
ring lasers Fysica en Astronomie
tunable lasers Fysica en Astronomie
wavelengths Fysica en Astronomie

Netwerk Recente externe samenwerking op landenniveau. Duik in de details door op de stippen te klikken.


Foto van Huub P.M.M. Ambrosius

Huub P.M.M. Ambrosius

Persoon: OBP : Ondersteunend en Beheerspersoneel

Foto van Jeroen Bolk

Jeroen Bolk

Persoon: OBP : Ondersteunend en Beheerspersoneel

Geen foto van Niall Kelly

Niall Kelly

Persoon: OWP : Docent / Onderzoeker


Onderzoeksoutput 2004 2020

Indium phosphide membrane nanophotonic integrated circuits on silicon

Jiao, Y., van der Tol, J., Pogoretskii, V., van Engelen, J., Kashi, A. A., Reniers, S., Wang, Y., Zhao, X., Yao, W., Liu, T., Pagliano, F., Fiore, A., Zhang, X., Cao, Z., Kumar, R. R., Tsang, H. K., van Veldhoven, R., de Vries, T., Geluk, E. J., Bolk, J. & 3 anderen, Ambrosius, H., Smit, M. & Williams, K., jan 2020, (Geaccepteerd/In druk) In : Physica Status Solidi (A) Applications and Materials Science. 1900606.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

Open Access
Indium phosphide
indium phosphides

Application of optical proximity correction for 193 nm deep UV enabled InP photonic integrated circuits

Bolk, J., Ambrosius, H., Latkowski, S., Unal, N., Ritter, D. & Williams, K., 25 apr 2019, blz. 1-3. 3 blz.

Onderzoeksoutput: Bijdrage aan congresPoster

integrated circuits
3 Citaties (Scopus)
31 Downloads (Pure)

Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition

Mameli, A., Karasulu, B., Verheijen, M., Barcones Campo, B., Macco, B., Mackus, A., Kessels, E. & Roozeboom, F., 26 feb 2019, In : Chemistry of Materials. 31, 4, blz. 1250-1257 8 blz.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

Open Access
Atomic layer deposition
Electron beams
Chemical activation
Density functional theory


Trymax Reports Order from Photonics Research Organization

Huub P.M.M. Ambrosius


1 item van Media-aandacht

Pers / media: Vakinhoudelijk commentaar

Trymax Secures Order from Photonics Research Organization

Huub P.M.M. Ambrosius


1 item van Media-aandacht

Pers / media: Vakinhoudelijk commentaar

Trymax Gets Order from Photonics Research Organization

Huub P.M.M. Ambrosius


1 item van Media-aandacht

Pers / media: Vakinhoudelijk commentaar