Projecten per jaar
Organisatieprofiel
Introductie / missie
This Lab focusses on control techniques in lithographic scanners, in particular related to high-accuracy positioning systems.
Over de organisatie
A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.
Vingerafdruk
Netwerk
Profielen
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Hans Butler
- Department of Electrical Engineering, Control of High-Precision Mechatronic Systems Lab
- Department of Electrical Engineering, Control Systems - Hoogleraar
Persoon: HGL : Hoogleraar, HGL : Hoogleraar
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Yanin Kasemsinsup, MSc
- Department of Electrical Engineering, Control of High-Precision Mechatronic Systems Lab
- Department of Electrical Engineering, Control Systems - Docent
Persoon: Prom. : Promovendus, OWP : Docent / Onderzoeker
projecten
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TKI-HTSM PPS-toeslag Advanced piezo-electric water stage for next generation lithography and metrology application - ASML project 2: Control architecture and design for a piezo-electric wafer stage
Van den Hof, P. M. J., Bosman Barros, C., Nawijn, H. & van der Hagen, D.
1/01/18 → 31/12/22
Project: Onderzoek direct
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ERC Grant R. Toth (APROCS)
Tóth, R., Tóth, R., Schoukens, M., Bloemers, T. A. H., Koelewijn, P. J. W., Sadeghzadeh, A., Nawijn, H., Iacob, L., Cox, P. B. & van der Hagen, D.
1/09/17 → 31/08/22
Project: Onderzoek direct
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ERC Grant PvdHof SYSDYNET
Van den Hof, P. M. J., Van den Hof, P. M. J., Haesaert, S., Kivits, E. M. M. (., Shi, S., Weiland, S., Lazar, M., Donkers, M. C. F. (., Tóth, R., Steentjes, T. R. V., Ramaswamy, K., Ludlage, J. H. A., Dreef, H. J. (., Cheng, X., Nawijn, H. & van der Hagen, D.
1/09/16 → 31/08/21
Project: Onderzoek direct
Onderzoeksoutput
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A Closed-Form Solution to Estimate Spatially Varying Parameters in Heat and Mass Transport
van Kampen, R. J. R., Das, A., Weiland, S. & van Berkel, M., nov 2021, In : IEEE Control Systems Letters. 5, 5, blz. 1681-1686 6 blz., 9284622.Onderzoeksoutput: Bijdrage aan tijdschrift › Tijdschriftartikel › Academic › peer review
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Feedforward Control for Parameter-Varying Systems
Kasemsinsup, Y., 23 feb 2021, Eindhoven: Technische Universiteit Eindhoven. 149 blz.Onderzoeksoutput: Scriptie › Dissertatie 1 (Onderzoek TU/e / Promotie TU/e)
Open AccessBestand -
Multiphysical modeling and optimal control of material properties for photopolymerization processes
Classens, K. H. J., Hafkamp, T. M., Westbeek, S., Remmers, J. J. C. & Weiland, S., feb 2021, In : Additive Manufacturing. 38, 13 blz., 101520.Onderzoeksoutput: Bijdrage aan tijdschrift › Tijdschriftartikel › Academic › peer review
Open AccessBestand
Knipsels
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US Patent Issued to ASML Netherlands on Feb. 16 for "Support structure, method and lithographic apparatus" (Dutch Inventor)
17/02/21
1 item van Media-aandacht
Pers / media: Vakinhoudelijk commentaar
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US Patent Issued to ASML Netherlands on Sept. 29 for "Lithographic apparatus and device manufacturing method" (Dutch Inventors)
29/09/20
1 item van Media-aandacht
Pers / media: Vakinhoudelijk commentaar
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US Patent Issued to ASML Netherlands on Aug. 4 for "Projection system and mirror and radiation source for a lithographic apparatus" (Dutch Inventors)
4/08/20
1 item van Media-aandacht
Pers / media: Vakinhoudelijk commentaar
Scripties/Masterproeven
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Active damping for charge driven piezoelectric nanopositioning stage using self sensing control
Auteur: Di Filippo, R., 19 sep 2018Begeleider: Weiland, S. (Afstudeerdocent 1), Butler, H. (Afstudeerdocent 2), Jansen, B. (Externe coach) & Vandervelden, R. (Externe persoon) (Externe coach)
Scriptie/Masterproef: Master
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Adaptive friction compensation for an industrial coreless linear motor setup
Auteur: van den Boom, P., 13 dec 2018Begeleider: Nguyen, T. (Afstudeerdocent 1), Lazar, M. (Afstudeerdocent 2) & Butler, H. (Afstudeerdocent 2)
Scriptie/Masterproef: Master
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Adaptive port-Hamiltonian discretization of distributed parameter systems
Auteur: Meijer, T., 25 okt 2018Begeleider: Weiland, S. (Afstudeerdocent 1) & van den Hurk, D. (Afstudeerdocent 2)
Scriptie/Masterproef: Master