Projecten per jaar
Organisatieprofiel
Introductie / missie
This Lab focusses on control techniques in lithographic scanners, in particular related to high-accuracy positioning systems.
Over de organisatie
A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.
Vingerafdruk
Netwerk
Profielen
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Hans Butler
- Electrical Engineering, Control of High-Precision Mechatronic Systems Lab
- Electrical Engineering, Control Systems - Hoogleraar
Persoon: HGL : Hoogleraar, HGL : Hoogleraar
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Mircea Lazar
- Electrical Engineering, Control of High-Precision Mechatronic Systems Lab
- Electrical Engineering, Constrained Control of Complex Systems
- Electrical Engineering, Dynamic Networks: Data-Driven Modeling and Control
- Electrical Engineering, Autonomous Motion Control (AMC) Lab
- Electrical Engineering, Cyber-Physical Systems Center Eindhoven
- EAISI High Tech Systems - Universitair Hoofddocent
- EAISI Mobility - Universitair Hoofddocent
- Electrical Engineering, Control Systems - Universitair Hoofddocent
Persoon: UHD : Universitair Hoofddocent, UD : Universitair Docent
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AquaConnect, key technologies for safeguarding regional water provision in fresh water stressed deltas
Goswami, D., Voeten, J. P. M., Haghi, M., Verheijen, P. C. N., Lazar, M., de Mol-Regels, M. & van der Hagen, D.
15/09/21 → 31/08/25
Project: Onderzoek direct
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TKI-HTSM PPS-toeslag Advanced piezo-electric water stage for next generation lithography and metrology application - ASML project 2: Control architecture and design for a piezo-electric wafer stage
Van den Hof, P. M. J., Bosman Barros, C., Nawijn, H., van der Hagen, D. & Tóth, R.
1/01/18 → 31/12/22
Project: Onderzoek direct
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ERC Grant R. Toth (APROCS)
Tóth, R., Tóth, R., Schoukens, M., Bloemers, T. A. H., Koelewijn, P. J. W., Nawijn, H., Iacob, L. C. & van der Hagen, D.
1/09/17 → 31/08/22
Project: Onderzoek direct
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Active deformation control for a magnetically-levitated planar motor mover
Proimadis, I., Custers, C., Toth, R., Jansen, J. W., Butler, H., Lomonova, E. & Van den Hof, P. M. J., 2022, In: IEEE Transactions on Industry Applications. 58, 1, blz. 242-249 8 blz.Onderzoeksoutput: Bijdrage aan tijdschrift › Tijdschriftartikel › Academic › peer review
3 Downloads (Pure) -
A guide to learning modules in a dynamic network
Ramaswamy, K. R., 3 mei 2022, Eindhoven: Eindhoven University of Technology. 297 blz.Onderzoeksoutput: Scriptie › Dissertatie 1 (Onderzoek TU/e / Promotie TU/e)
Open AccessBestand -
Controller identification for data-driven model-reference distributed control
Steentjes, T. R. V., Lazar, M. & Van den Hof, P. M. J., 3 jan. 2022, 2021 European Control Conference, ECC 2021. Institute of Electrical and Electronics Engineers, blz. 2358-2363 6 blz. 9655114Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
Open AccessBestand24 Downloads (Pure)
Prijzen
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Journal of Process Control Paper Prize Award 2020-Survey Category
Saltik, M. B. (Ontvanger), Özkan, Leyla (Ontvanger), Ludlage, Jobert H.A. (Ontvanger), Weiland, Siep (Ontvanger) & Van den Hof, Paul M.J. (Ontvanger), 2020
Prijs: Anders › Werk, activiteit of publicatie gerelateerde prijzen (lifetime, best paper, poster etc.) › Wetenschappelijk
Knipsels
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US Patent Issued to ASML Netherlands on April 12 for "Electron beam inspection apparatus stage positioning" (Dutch, American Inventors)
13/04/22
1 item van Media-aandacht
Pers / media: Vakinhoudelijk commentaar
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US Patent Issued to ASML Netherlands on March 8 for "Frame assembly, lithographic apparatus and device manufacturing method" (Dutch Inventors)
9/03/22
1 item van Media-aandacht
Pers / media: Vakinhoudelijk commentaar
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US Patent Issued to ASML Netherlands on March 1 for "Metrology apparatus" (Dutch Inventors)
1/03/22
1 item van Media-aandacht
Pers / media: Vakinhoudelijk commentaar
Scripties/Masterproeven
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Active damping for charge driven piezoelectric nanopositioning stage using self sensing control
Auteur: Di Filippo, R., 19 sep. 2018Begeleider: Weiland, S. (Afstudeerdocent 1), Butler, H. (Afstudeerdocent 2), Jansen, B. (Externe coach) & Vandervelden, R. (Externe persoon) (Externe coach)
Scriptie/Masterproef: Master
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Adaptive friction compensation for an industrial coreless linear motor setup
Auteur: van den Boom, P. W. M., 13 dec. 2018Begeleider: Nguyen, T. (Afstudeerdocent 1), Lazar, M. (Afstudeerdocent 2) & Butler, H. (Afstudeerdocent 2)
Scriptie/Masterproef: Master
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Adaptive port-Hamiltonian discretization of distributed parameter systems
Auteur: Meijer, T., 25 okt. 2018Begeleider: Weiland, S. (Afstudeerdocent 1) & van den Hurk, D. (Afstudeerdocent 2)
Scriptie/Masterproef: Master