Thermal CVD

    J.J.M. Sanders (Manager)

Uitrusting/faciliteit: Uitrusting



    In thermal CVD, energy in the form of heat is supplied to activate the required gas and gas-solid phase reactions. In all thermal CVD processes the reactant gases are delivered to a reactor. An oven or hot lamps typically supply the thermal energy. By-products are removed by the gas flow or by a pumping unit. At PMP we have both atmospheric and low pressure thermal CVD set-ups. These set-ups are used to synthesize for example carbon nanotubes and graphene.

    Vingerafdruk Verken de onderzoeksgebieden waarvoor deze uitrusting is gebruikt. Deze labels worden gegenereerd op basis van de gerelateerde outputs. Samen vormen ze een unieke vingerafdruk.