Hot-Wire CVD

    J.J.M. Sanders (Manager)

Uitrusting/faciliteit: Uitrusting

    Uitrustingsdetails

    Tekst

    Also known as catalytic CVD (Cat-CVD), this process adopts a hot filament/grid to chemically decompose the precursor molecules. The grid temperature and substrate temperature are independently controlled, allowing low temperatures at the substrate for better adsorption rates at the substrate as well as compatibility with thermally sensitive substrates (e.g. polymers) and higher temperatures at the grid for enhanced precursor decomposition.

    Vingerafdruk Verken de onderzoeksgebieden waarvoor deze uitrusting is gebruikt. Deze labels worden gegenereerd op basis van de gerelateerde outputs. Samen vormen ze een unieke vingerafdruk.