WIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "POSITIONING DEVICE, LITHOGRAPHIC APPARATUS, METHOD FOR COMPENSATING A BALANCE MASS TORQUE AND DEVICE MANUFACTURING METHOD" (DUTCH INVENTORS)

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Periode17 jul 2019

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  • TitelWIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "POSITIONING DEVICE, LITHOGRAPHIC APPARATUS, METHOD FOR COMPENSATING A BALANCE MASS TORQUE AND DEVICE MANUFACTURING METHOD" (DUTCH INVENTORS)
    Media naam/outletUS Fed News
    LandVerenigde Staten van Amerika
    Release datum17/07/19
    PersonenHans Butler