WIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "OBJECT POSITIONING SYSTEM, CONTROL SYSTEM, LITHOGRAPHIC APPARATUS, OBJECT POSITIONING METHOD AND DEVICE MANUFACTURING METHOD" (DUTCH INVENTORS)

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Periode14 dec 2015

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  • TitelWIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "OBJECT POSITIONING SYSTEM, CONTROL SYSTEM, LITHOGRAPHIC APPARATUS, OBJECT POSITIONING METHOD AND DEVICE MANUFACTURING METHOD" (DUTCH INVENTORS)
    Media naam/outletUS Fed News
    Land/RegioVerenigde Staten van Amerika
    Release datum14/12/15
    PersonenHans Butler, Nic J. Dirkx