WIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "BEARING DEVICE, MAGNETIC GRAVITY COMPENSATOR, VIBRATION ISOLATION SYSTEM, LITHOGRAPHIC APPARATUS, METHOD TO CONTROL A GRAVITY COMPENSATOR HAVING A NEGATIVE STIFFNESS AND SPRING" (DUTCH INVENTORS)

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Periode24 sep 2018

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  • TitelWIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "BEARING DEVICE, MAGNETIC GRAVITY COMPENSATOR, VIBRATION ISOLATION SYSTEM, LITHOGRAPHIC APPARATUS, METHOD TO CONTROL A GRAVITY COMPENSATOR HAVING A NEGATIVE STIFFNESS AND SPRING" (DUTCH INVENTORS)
    Media naam/outletUS Fed News
    LandVerenigde Staten van Amerika
    Release datum24/09/18
    PersonenHans Butler