Investigators at Eindhoven University of Technology Discuss Findings in Applied Physics [Isotropic Atomic Layer Etching of Gan Using Sf6 Plasma and Al(Ch3)(3)]

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Periode22 sep. 2023

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  • TitelInvestigators at Eindhoven University of Technology Discuss Findings in Applied Physics [Isotropic Atomic Layer Etching of Gan Using Sf6 Plasma and Al(Ch3)(3)]
    Media naam/outletPhysics Daily News
    Release datum22/09/23
    PersonenHarm C.M. Knoops, Adrie J.M. Mackus