A Switched-Mode Power Amplifier for Ion Energy Control In Plasma Etching

Yu, Q. (Spreker)

Activiteit: Types gesprekken of presentatiesAangemelde presentatieWetenschappelijk

Periode10 sep 2020
Evenementstitel2020 22nd European Conference on Power Electronics and Applications (EPE'20 ECCE Europe): null
EvenementstypeCongres
LocatieLyon, Frankrijk