47th Annual SVC Technical Conference, Dallas, USA

Activiteit: Types gesprekken of presentatiesAangemelde presentatieWetenschappelijk

Beschrijving

PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics
Periode30 apr 2004
Evenementstitel47th Annual SVC Technical Conference, Dallas, USA
EvenementstypeCongres