Up-scaling of the Al-doped zinc oxide plasma deposition process
: plasma studies and film characterization

  • Y.G. Melese

Student thesis: Master

Date of Award31 Aug 2012
Original languageEnglish
SupervisorK. Sharma (Supervisor 1), Harm C.M. Knoops (Supervisor 2) & M. (Adriana) Creatore (Supervisor 2)

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