Tungsten deposition on quartz studied by in-situ time-resolved mass spectrometry

  • Ö.F. Tekcan

Student thesis: Master

Abstract

Date of Award31 May 1996
Original languageEnglish
SupervisorP.A.C. Groenen (Supervisor 1), J.G.A. Hölscher (Supervisor 2) & H.H. Brongersma (Supervisor 2)

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