Time-frequency adaptive Iterative Learning Control

: with application to a wafer stage

  • R.M.L. Ellenbroek

Student thesis: Master

Abstract

Date of Award31 Mar 2003
Original languageEnglish
SupervisorMaarten Steinbuch (Supervisor 1), A.I. (Iuliana) Rotariu (Supervisor 2), M.J.G. (René) van de Molengraft (Supervisor 2) & Ad A.H. Damen (Supervisor 2)

Cite this

Time-frequency adaptive Iterative Learning Control: with application to a wafer stage
Ellenbroek, R. M. L. (Author). 31 Mar 2003

Student thesis: Master