Time-frequency adaptive Iterative Learning Control
: with application to a wafer stage

  • R.M.L. Ellenbroek

Student thesis: Master

Abstract

Date of Award31 Mar 2003
Original languageEnglish
SupervisorMaarten Steinbuch (Supervisor 1), A.I. (Iuliana) Rotariu (Supervisor 2), M.J.G. (René) van de Molengraft (Supervisor 2) & Ad A.H. Damen (Supervisor 2)

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