The impact of spare parts service measures on the performance measures of a wafer fabrication process

  • D.H. Soellaart

Student thesis: Master

Abstract

Date of Award31 Jan 2019
Original languageEnglish
SupervisorRob J.I. Basten (Supervisor 1), Nico P. Dellaert (Supervisor 2) & Douniel Lamghari-Idrissi (External coach)

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