Temperature effects on deuterated a-Si:H deposition using an expanding thermal plasma

  • Frank van de Pas

Student thesis: Master

Abstract

Date of Award30 Apr 1997
Original languageEnglish
SupervisorR.J. Severens (Supervisor 1), M.C.M. (Richard) van de Sanden (Supervisor 2), Leo J. van IJzendoorn (Supervisor 2) & Martien J.A. de Voigt (Supervisor 2)

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