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Spatial ALD of zinc tin oxide
: growth and characterization of zinc tin oxide thin films deposited by co-injection spatial atomic layer deposition

  • B.S.P. de Raadt

Student thesis: Master

Date of Award31 Aug 2015
Original languageEnglish
SupervisorM. (Adriana) Creatore (Supervisor 1) & Andrea Illiberi (External coach)

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    File: application/pdf, 2.78 MB

    Type: Thesis

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