Simulation and experimental measurements of two dimensional ion flux distributions in inductively coupled plasmas

  • R.E.M.W. Bessems

Student thesis: Master

Date of Award31 Dec 2003
Original languageEnglish
SupervisorGerrit M.W. Kroesen (Supervisor 1) & Eray S. Aydil (External coach)

Cite this

Documents

  • full text

    File: application/pdf, 3.89 MB

    Type: Thesis

'