Scale effects in freestanding thin metal films for RF MEMS applications

  • Zlata Jelacic

Student thesis: Master

Abstract

Date of Award31 Aug 2005
Original languageEnglish
SupervisorMarc G.D. Geers (Supervisor 1), Jaap M.J. den Toonder (Supervisor 2) & W.A.M. Brekelmans (Supervisor 2)

Cite this

'