Remote plasma atomic layer deposition of TaNx films

Student thesis: Master

Date of Award2007
Original languageEnglish
SupervisorM.C.M. (Richard) van de Sanden (Supervisor 1), Erik Langereis (Supervisor 2) & W.M.M. (Erwin) Kessels (Supervisor 2)

Cite this

Documents

  • 634490

    File: application/pdf, 1.94 MB

    Type: Thesis

'