Remote plasma atomic layer deposition of TaNx films

Student thesis: Master

Abstract

Date of Award2007
Original languageEnglish
SupervisorM.C.M. (Richard) van de Sanden (Supervisor 1), Erik Langereis (Supervisor 2) & W.M.M. (Erwin) Kessels (Supervisor 2)

Cite this

Remote plasma atomic layer deposition of TaNx films
Knoops, H. C. M. (Author). 2007

Student thesis: Master