Positioning a precision stage with a walking piezolegs actuator

  • N.C.T. de Kleijn

Student thesis: Master

Abstract

Date of Award30 Sep 2006
Original languageEnglish
SupervisorM.J.G. (René) van de Molengraft (Coach) & Maarten Steinbuch (Supervisor 1)

Cite this

Positioning a precision stage with a walking piezolegs actuator
de Kleijn, N. C. T. (Author). 30 Sep 2006

Student thesis: Master