Position-dependent state observer design for a planar motor wafer stage

: a linear system with nonlinear outputs

Abstract

This paper is concerned with an investigation to design a position-dependent state observer system for a planar motor wafer stage. The purpose of such an observer is to accurately estimate the dominant flexible behavior of the stage structure. An observer design strategy has been developed during the investigation and tested successfully in a simulation environment. Both the investigation and the proposed method are discussed in this document.

Date of Award	30 Apr 2014
Original language	English
Supervisor	Siep Weiland (Supervisor 1), Hans Butler (Supervisor 2), K.W. Verkerk (Supervisor 2) & R.I. Kamidi (External coach)