Plasma-surface interaction studies during microcrystalline silicon thin-film growth
: the ion bombardment effect

  • X. Kang

Student thesis: Master

Date of Award31 Aug 2012
Original languageEnglish
SupervisorJ. Palmans (Supervisor 1), A.C. Bronneberg (Supervisor 2) & M. (Adriana) Creatore (Supervisor 2)

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