| Date of Award | 2022 |
|---|---|
| Original language | English |
| Supervisor | Harm C.M. Knoops (Supervisor 1) & W.M.M. (Erwin) Kessels (Supervisor 2) |
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Plasma-Enhanced Atomic Layer Deposition of Superconducting Tantalum Carbonitride for Quantum Devices
Student thesis: Master