Plasma-deposited polycrystalline silicon

: film growth and characterization

Student thesis: Master

Abstract

Date of Award31 Aug 2012
Original languageEnglish
SupervisorK. Sharma (Supervisor 1), M. (Adriana) Creatore (Supervisor 2) & W.M.M. (Erwin) Kessels (Supervisor 2)

Cite this

Plasma-deposited polycrystalline silicon: film growth and characterization
Macco, B. (Author). 31 Aug 2012

Student thesis: Master