Plasma-assisted atomic layer deposition of PtOx in high aspect ratio trenches

  • P.W.P. de Brouwer

Student thesis: Bachelor

Date of Award2013
Original languageEnglish
SupervisorI.J.M. Erkens (Supervisor 1) & W.M.M. (Erwin) Kessels (Supervisor 2)

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    Type: Thesis

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