Plasma-assisted atomic layer deposition of platinum studied by surface infrared spectroscopy

  • Frank L. Bloksma

Student thesis: Bachelor

Abstract

Date of Award2014
Original languageEnglish
Supervisor Roger H.E.C. Bosch (Supervisor 1) & W.M.M. (Erwin) Kessels (Supervisor 2)

Cite this

Plasma-assisted atomic layer deposition of platinum studied by surface infrared spectroscopy
Bloksma, F. L. (Author). 2014

Student thesis: Bachelor