Plasma and in situ film studies on silicon nitride growth for photovoltaic applications

  • F.J.H. van Assche

Student thesis: Master

Abstract

Date of Award31 Aug 2006
Original languageEnglish
SupervisorW.M.M. (Erwin) Kessels (Supervisor 1), J.G. Hong (Supervisor 2) & M.C.M. (Richard) van de Sanden (Supervisor 2)

Cite this

Plasma and in situ film studies on silicon nitride growth for photovoltaic applications
van Assche, F. J. H. (Author). 31 Aug 2006

Student thesis: Master