Plasma and in situ film studies on silicon nitride growth for photovoltaic applications

  • F.J.H. van Assche

Student thesis: Master

Abstract

Date of Award31 Aug 2006
Original languageEnglish
SupervisorW.M.M. (Erwin) Kessels (Supervisor 1), J.G. Hong (Supervisor 2) & M.C.M. (Richard) van de Sanden (Supervisor 2)

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