Patterns & correlations in scanner data for wafer output optimization

  • Arjun Sangitrao

Student thesis: Master

Abstract

Date of Award14 Aug 2020
Original languageEnglish
SupervisorMichael Burch (Supervisor 1), Ignacio Alonso (External coach), Konstantin Starkov (External coach), Steven van der Helm (External coach), Ernst W. Remij (External coach), Bram Schoenmakers (External coach) & Y. Zonneveld (External coach)

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