| Date of Award | 14 Aug 2020 |
|---|---|
| Original language | English |
| Supervisor | Michael Burch (Supervisor 1), Ignacio Alonso (External coach), Konstantin Starkov (External coach), Steven van der Helm (External coach), Ernst W. Remij (External coach), Bram Schoenmakers (External coach) & Y. Zonneveld (External coach) |
Patterns & correlations in scanner data for wafer output optimization
Student thesis: Master