Optical emission spectroscopy during plasma-assisted atomic layer deposition of TiO2

  • A.E. Huisman

Student thesis: Bachelor

Date of Award2012
Original languageEnglish
SupervisorN. Leick-Marius (Supervisor 1) & W.M.M. (Erwin) Kessels (Supervisor 2)

Cite this

Documents

  • full text

    File: application/pdf, 2.54 MB

    Type: Thesis

'