On the nucleation of Pt & Pd during atomic layer deposition & temperature programmed desorption for thin film analysis

  • R.H.J. Vervuurt

Student thesis: Master

Date of Award31 Dec 2012
Original languageEnglish
SupervisorM.J. Weber (Supervisor 1), Ageeth A. Bol (Supervisor 2) & W.M.M. (Erwin) Kessels (Supervisor 2)

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