On the nucleation of Pt & Pd during atomic layer deposition & temperature programmed desorption for thin film analysis

  • R.H.J. Vervuurt

Student thesis: Master

Abstract

Date of Award31 Dec 2012
LanguageEnglish
SupervisorM.J. Weber (Supervisor 1)Ageeth Bol (Supervisor 2) & Erwin Kessels (Supervisor 2)

Cite this

On the nucleation of Pt & Pd during atomic layer deposition & temperature programmed desorption for thin film analysis
Vervuurt, R. H. J. (Author). 31 Dec 2012

Student thesis: Master