| Date of Award | 31 Oct 2009 |
|---|---|
| Original language | English |
| Supervisor | P.P.J. van den Bosch (Supervisor 1), Siep Weiland (Supervisor 2) & F. van Belzen (Supervisor 2) |
Cite this
- Standard
Observer design for estimation the disturbances in focus and dose of a lithographic process
Student thesis: Master