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Numerical simulation of photolithography
H.W. Buurman
Mathematics and Computer Science
Student thesis
:
Master
Date of Award
31 Dec 1987
Original language
English
Supervisor
H. Paul Urbach (Supervisor 1) & J.P. Veltkamp (Supervisor 2)
Cite this
Standard
Numerical simulation of photolithography
Buurman, H. W. (Author).
31 Dec 1987
Student thesis
:
Master