Abstract
| Date of Award | 31 Dec 1987 |
|---|---|
| Original language | English |
| Supervisor | H. Paul Urbach (Supervisor 1) & J.P. (Peter) Veltkamp (Supervisor 2) |
Numerical simulation of photolithography
Student thesis: Master
Student thesis: Master
| Date of Award | 31 Dec 1987 |
|---|---|
| Original language | English |
| Supervisor | H. Paul Urbach (Supervisor 1) & J.P. (Peter) Veltkamp (Supervisor 2) |