Numerical simulation of photolithography

  • H.W. Buurman

Student thesis: Master

Abstract

Date of Award31 Dec 1987
Original languageEnglish
SupervisorH. Paul Urbach (Supervisor 1) & Peter Veltkamp (Supervisor 2)

Cite this

Numerical simulation of photolithography
Buurman, H. W. (Author). 31 Dec 1987

Student thesis: Master