Nonlinear feedback optimization for improved disturbance rejection and noise sensitivity in scanning stages

  • T. Tepe

Student thesis: Master

Abstract

Date of Award31 May 2011
Original languageEnglish
SupervisorHenk Nijmeijer (Supervisor 1), Marcel F. Heertjes (Supervisor 2) & Nathan van de Wouw (Supervisor 2)

Cite this

Nonlinear feedback optimization for improved disturbance rejection and noise sensitivity in scanning stages
Tepe, T. (Author). 31 May 2011

Student thesis: Master