New experimental setup for surface studies during silicon-based film growth
: radical sources and hydrogen-induced etching experiments

Student thesis: Master

Abstract

Date of Award31 Dec 2003
Original languageEnglish
SupervisorJohan P.M. Hoefnagels (Supervisor 1), W.M.M. (Erwin) Kessels (Supervisor 2) & M.C.M. (Richard) van de Sanden (Supervisor 2)

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