Nanometer accurate motion control of a magnetically levitated planar actuator

Student thesis: Master

Abstract

Date of Award28 Jun 2018
LanguageEnglish
SupervisorHans Butler (Supervisor 1), Roland Toth (Supervisor 2) & Ioannis Proimadis (Supervisor 2)

Cite this

Nanometer accurate motion control of a magnetically levitated planar actuator
Bloemers, T. A. H. (Author). 28 Jun 2018

Student thesis: Master