Multivariable system identification and control design
: a practical application to a 4-DOF wafer stage

  • H. El Bouazzaoui

Student thesis: Master

Abstract

Date of Award30 Jun 2016
Original languageEnglish
SupervisorBram de Jager (Supervisor 1) & L. van Bommel (External coach)

Cite this

Multivariable system identification and control design: a practical application to a 4-DOF wafer stage
El Bouazzaoui, H. (Author). 30 Jun 2016

Student thesis: Master