Date of Award | 31 Oct 2005 |
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Original language | English |
Supervisor | M.C.M. (Richard) van de Sanden (Supervisor 1), W.M.M. (Erwin) Kessels (Supervisor 2) & P.J. van den Oever (Supervisor 2) |
Modulated beam threshold ionization mass spectrometry: radical detection in the NH3/Ar and NH3/SiH4/Ar plasma
Student thesis: Master