Modulated beam threshold ionization mass spectrometry
: radical detection in the NH3/Ar and NH3/SiH4/Ar plasma

  • J.L. van Hemmen

Student thesis: Master

Abstract

Date of Award31 Oct 2005
Original languageEnglish
SupervisorM.C.M. (Richard) van de Sanden (Supervisor 1), W.M.M. (Erwin) Kessels (Supervisor 2) & P.J. van den Oever (Supervisor 2)

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