Modeling of dynamic effects in high-voltage electrostatic clamps

Student thesis: Master

Abstract

Date of Award30 Aug 2016
LanguageEnglish
SupervisorRob Mestrom (Supervisor 1) & Jeroen van Duivenbode (External coach)

Cite this

Modeling of dynamic effects in high-voltage electrostatic clamps
van den Biggelaar, A. J. (Author). 30 Aug 2016

Student thesis: Master