Modeling and identification of a precision stage with a walking piezolegs actuator

  • M. van Leeuwen

Student thesis: Master

Abstract

Date of Award2008
Original languageEnglish
SupervisorMaarten Steinbuch (Supervisor 1), M.J.G. (René) van de Molengraft (Coach), Roel J.E. Merry (Coach) & Edwin R.M. Verschueren (Coach)

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