Model order reduction and thermal error-correction model for a precision stage

  • Artunc Ulucan

Student thesis: Master

Date of Award30 Sept 2012
Original languageEnglish
SupervisorP. Philips (External coach), J.C.G. van der Sanden (External coach), Anton A. van Steenhoven (Supervisor 1) & Michel F.M. Speetjens (Supervisor 2)

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