Mie scattering rotating compensator ellipsometry and infrared absorption spectroscopy on particles in RF plasmas

  • N. Simons

Student thesis: Master

Abstract

Date of Award30 Apr 1997
Original languageEnglish
SupervisorG.H.P.M Swinkels (Supervisor 1), Gerrit M.W. Kroesen (Supervisor 2) & F.J. de Hoog (Supervisor 2)

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