Measurements and modeling of the mechanical behaviour of thin free-standing metal films for RF MEMS

  • B.G.R. van Schaik

Student thesis: Master

Date of Award31 Oct 2006
Original languageEnglish
SupervisorMarc G.D. Geers (Supervisor 1), W.A.M. Brekelmans (Supervisor 2), Jaap M.J. den Toonder (External coach) & Auke R. van Dijken (External coach)

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    Type: Thesis

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