Massa-opgeloste ionenenergieverdelingen op de elektroden in 13,56 MHz Ar, CF4 en N2 plasma's

  • M.J.M. van Sambeek

Student thesis: Master

Abstract

Date of Award28 Feb 1993
Original languageDutch
SupervisorR.J.M.M. Snijkers (Supervisor 1)

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